• RGL Series atmosphere tube furnace Model:RGL Series atmosphere tube furnace
    Main features:

    Use of high-purity quartz  pipe as a nternal furnace, good cleanliness;  Fire-resistant, thermal insulation  material used all the advanced  light-weight fiber materials, the whole low  energy consumption and  Warming up fast; The heating elements is FEC ceramic  fiber heaters;  Temperature control system uses a imported multi-intelligent   temperature control instrument, it has a good stability and  repeatability.


Introduction
Ap-Fields
Naming Rules

Model

RGL(D)-07/75/3
RGL(S)-09/60/6
RGL(D)-18/110/3
RGL(D)-25/100/6

Max.Temp

1050°C
1050°C
1050°C
1050°C

Operating Temp

RT-1000°C
RT-1000°C
RT-1000°C
RT-1250°C

Temp Accuracy

±1.5°C
±1.5°C
±1.5°C
±1.5°C

Number Temp region

3
6
3
6

Length of heating zone

750mm
600mm
1100mm
1000mm

Furnace tube size

Φ70(outer)

×2200(mm)

Φ90(outer)

×1800(mm)

Φ180(outer)

×100(mm)

Φ250(outer)

×2100(mm)

Furnace tube Material

quartz tube
quartz tube
quartz tube
SiC tube

Number of furnace tube

quartz tube
Double
Single
Single

Heating element

resistance wire
resistance wire
resistance wire
Si-C rods

Max power

8kw
15kw
20kw
60kw

Options

 
V
 
 
vacuum system��single-stage mechanical pump
 
Q
 
Atmosphere system:Rotameter or mass flowmeter (domestic/ imported)
 
R
Print record : Paper Recorder /Paperless Recorder
Other special process requirements, please note when ordering.

RGL series atmosphere tube furnace main used in the proliferation and oxidation process of semiconductor materials. Can also be applied to the glass on the metal package welding, heat treatment of Quartz products, calcined LED light-emitting materials powders, and other technology.

   Number of temperature region

   The total length of the heating zone
   The outside diameter of furnace pipe
   single / Double pipe
   Series code

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